JPS6236065U - - Google Patents
Info
- Publication number
- JPS6236065U JPS6236065U JP12085885U JP12085885U JPS6236065U JP S6236065 U JPS6236065 U JP S6236065U JP 12085885 U JP12085885 U JP 12085885U JP 12085885 U JP12085885 U JP 12085885U JP S6236065 U JPS6236065 U JP S6236065U
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- target side
- vacuum chamber
- covered
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (en]) | 1985-08-08 | 1985-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (en]) | 1985-08-08 | 1985-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236065U true JPS6236065U (en]) | 1987-03-03 |
Family
ID=31009572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12085885U Pending JPS6236065U (en]) | 1985-08-08 | 1985-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236065U (en]) |
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1985
- 1985-08-08 JP JP12085885U patent/JPS6236065U/ja active Pending